Skip to Navigation
Home
Center for X-Ray Optics
Pioneering Soft X-Ray Optics Research and Applications
Home › Facilities › Laboratories

Laboratories

Printer-friendly versionPrinter-friendly versionPDF versionPDF version

CXRO operates several laboratories for the manufacture and characterization of X-Ray optics.  The most prominent involve fabrication of nanometer-sized structures in the nanofabrication laboratory, and the creation and characterization of multilayer optics in the multilayer laboratory.

  • Nanofabrication
  • Multilayer Coatings
‹ Facilities up Nanofabrication ›

Comments/QuestionsNotice to Users

  • X-Ray Interactions With Matter
  • Home
  • Links
    • Advanced Light Source (ALS)
    • Lawrence Berkeley National Lab (LBNL)
    • Materials Sciences Division (MSD)
  • X-Ray Interactions With Matter
  • Research
    • EUV Lithography
      • High Resolution
      • Resist Development
      • Mask Development
      • 0.5 NA: the Next Level
    • Multilayer Optics
    • Specialized Diffractive Optics
    • Magnetic Soft X-Ray Microscopy
  • Beamlines and Endstations at the ALS
    • X-Ray Microscopy at Beamline 6.1.2
    • Reflectometry and Scattering at Beamline 6.3.2
    • EUV Mask Inspection at Beamline 11.3.2
    • EUV Interferometry at Beamline 12.0.1
    • Coherent Soft X-Rays at Beamline 12.0.2.1
  • Laboratories
    • Nanofabrication
    • Multilayer Coatings
  • Contact Us
  • Personnel
  • Publications
  • Departments
    • Mechanical Engineering & Systems Design
    • Instrumentation and Fabrication
    • Electronic Instrumentation
    • Computing Services
      • Migration FAQ
      • FAQ
      • Staff
      • User's Guide to Research Highlights
    • Administration & Budget
  • Log in
http://www.lbl.gov